Research Information System
Engineering Proceedings, vol.82, no.1, 2024 (Scopus)
In this study, a low-temperature co-fired ceramic (LTCC)-based circular diaphragm design was considered for Fabry–Pérot Interferometer (FPI) pressure sensor applications. The characteristics of the LTCC-based circular diaphragm were analyzed using FEM analysis. The selected thicknesses of the LTCC diaphragms were 50 μm, 75 μm and 100 μm, with diameters of 3 mm, 4 mm and 5 mm, respectively. Our results showed that the sensitivity and frequency response of this structure can be designed flexibly by adjusting the parameters of the ceramic diaphragm size, including the radius and thickness. The key contribution of this work is that it demonstrates the performance of LTCC diaphragms with different sizes, which could be useful for future works.