Impact of proton irradiation on deep level states in n-GaN

Zhang Z., Arehart A., ÇİNKILIÇ E., Chen J., Zhang E., Fleetwood D., ...More

Applied Physics Letters, vol.103, no.4, 2013 (SCI-Expanded) identifier

  • Publication Type: Article / Article
  • Volume: 103 Issue: 4
  • Publication Date: 2013
  • Doi Number: 10.1063/1.4816423
  • Journal Name: Applied Physics Letters
  • Journal Indexes: Science Citation Index Expanded (SCI-EXPANDED), Scopus
  • Hakkari University Affiliated: No


Deep levels in 1.8 MeV proton irradiated n-type GaN were systematically characterized using deep level transient spectroscopies and deep level optical spectroscopies. The impacts of proton irradiation on the introduction and evolution of those deep states were revealed as a function of proton fluences up to 1.1 × 1013 cm-2. The proton irradiation introduced two traps with activation energies of EC - 0.13 eV and 0.16 eV, and a monotonic increase in the concentration for most of the pre-existing traps, though the increase rates were different for each trap, suggesting different physical sources and/or configurations for these states. Through lighted capacitance voltage measurements, the deep levels at E C - 1.25 eV, 2.50 eV, and 3.25 eV were identified as being the source of systematic carrier removal in proton-damaged n-GaN as a function of proton fluence. © 2013 AIP Publishing LLC.