Analysis of MEMS Based Accelerometer Sensor via COMSOL

ERTUĞRUL İ., AYGÜL E., YALÇINKAYA S., ÜLKİR O.

5th International Congress on Engineering, Architecture and Design, İstanbul, Turkey, 21 - 22 November 2019, vol.5, pp.210-215, (Full Text)

  • Publication Type: Conference Paper / Full Text
  • Volume: 5
  • City: İstanbul
  • Country: Turkey
  • Page Numbers: pp.210-215
  • Hakkari University Affiliated: Yes