Capacitive Micromachined Ultrasonic Transducer (CMUT): Analytical Evaluation of Membranes Performance Under Fabrication Related Stress

YILDIZ F.

KSÜ Mühendislik Bilimleri Dergisi, vol.21, no.4, pp.280-285, 2018 (Peer-Reviewed Journal)

• Publication Type: Article / Article
• Volume: 21 Issue: 4
• Publication Date: 2018
• Doi Number: 10.17780/ksujes.409395
• Journal Name: KSÜ Mühendislik Bilimleri Dergisi
• Page Numbers: pp.280-285
• Hakkari University Affiliated: Yes