Effect of Substrate Bias on Mechanical Properties of Magnetron Sputtered AlTiN-B₄C Films

KISACIK Ö., YILDIRIM C., KAÇAR E., TURAN S., SÜRDEM S.

21st International Metallurgy and Materials Congress, İstanbul, Turkey, 6 October - 08 December 2022

  • Publication Type: Conference Paper / Full Text
  • City: İstanbul
  • Country: Turkey
  • Hakkari University Affiliated: Yes