Capacitive Micromachined Ultrasonic Transducer Packaging for Forward looking Ultrasonic Endoscope using Low Temperature Co fired Ceramic Side Via

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YILDIZ F., Matsunaga T., Haga Y.

IEEJ TRANSACTIONS ON SENSORS AND MICROMACHINES, vol.136, no.12, pp.515-521, 2016 (Scopus)

• Publication Type: Article / Article
• Volume: 136 Issue: 12
• Publication Date: 2016
• Doi Number: 10.1541/ieejsmas.136.515
• Journal Name: IEEJ TRANSACTIONS ON SENSORS AND MICROMACHINES
• Journal Indexes: Scopus
• Page Numbers: pp.515-521
• Hakkari University Affiliated: Yes